Fabrication of silicon microprobes for optical near-field applications

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Fabrication of silicon microprobes for optical near-field applications

by Phan Ngoc Minh , Ono Takahito , Esashi Masayoshi

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First published: 2002 1 language ISBN: 9781420040708

Subjects

Micromachining Silicon Near-field microscopy Microprobe analysis Micro-usinage Analyse par microsonde Microscopie en champ proche Silicium TECHNOLOGY & ENGINEERING Optics

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