Glancing Angle Deposition of Thin Films View on Open Library

Glancing Angle Deposition of Thin Films

by Matthew M. Hawkeye , Michael T. Taschuk , Michael J. Brett

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First published: 2014 1 language ISBN: 9781118847510
Subjects
Nanotechnology Chemical vapor deposition Nanoelectromechanical systems Design and construction Vapor-plating Nanostructures

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