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Physics of High Frequency Capacitive Discharge
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Physics of High Frequency Capacitive Discharge
by
V. P. Savinov
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First published: 2018
1 language
ISBN: 9781138600805
Subjects
Electric discharges through gases
Plasma (Ionized gases)
Mathematical physics
Semiconductors
Fluids
Physical and theoretical Chemistry
Chemistry
Physics
Plasma (Gaz ionisés)
Physique mathématique
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