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Adhesion Aspects in MEMS/NEMS
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Adhesion Aspects in MEMS/NEMS
by
Seong H. Kim
,
Michael T. Dugger
,
Kash L. Mittal
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First published: 2011
1 language
ISBN: 9781040192214
Subjects
Nanostructures
Surfaces (technology)
Adhesion
Microelectromechanical systems
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