Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems View on Open Library

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems

by Carol F. Vezzetti

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First published: 1992 1 language
Subjects
Calibration Integrated circuits Microscopes Microscopy Optical measurements Standards Chromium Spectra

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