Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI View on Open Library

Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI

by International Symposium on Patterning Science and Technology (2nd 1991 Phoenix, Ariz.)

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First published: 1992 1 language ISBN: 9781566770071
Subjects
Congresses Design and construction Integrated circuits Lithography Metallizing Microelectronic packaging Ultra large scale integration Microelectronics Microlithography Photoresists

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