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Phenomenological modeling of reactive ion etching for real-time feedback control

Name: Phenomenological modeling of reactive ion etching for real-time feedback control
ISBN: 9780591016536

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First published: 1996 1 language ISBN: 9780591016536

Electrical engineering: Systems

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United States. National Transportation Safety Board.

United States. General Accounting Office

Thomas E. Pinelli

Peter W. Hawkes

American Radio Relay League (ARRL)

Cornelius T. Leondes