Nano- and microelectromechanical systems
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First published: 2000
1 language
ISBN: 9781351826488
Description
"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
