Pulsed and pulsed bias sputtering View on Open Library

Pulsed and pulsed bias sputtering

by Edward V. Barnat , Toh-Ming Lu

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First published: 2003 1 language ISBN: 9781461350637
Subjects
Cathode sputtering (Plating process) Thin films Semi-conductors & super-conductors Physics Electronics - Semiconductors Science Technology & Industrial Arts Science/Mathematics Engineering - General Material Science

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