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Electron Beam Lithography

52 books found

Nanofabrication
Nanofabrication

by Ampere A. Tseng

2007 4 ed.
Emerging lithographic technologies XI
Emerging lithographic technologies XI
2007 2 ed.
Nanofabrication
Nanofabrication
2008 2 ed.
Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)
Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer...

by Arnold W. Yanof

1988 2 ed.
Electron-Beam, X-Ray, and Ion-Beam Technology
Electron-Beam, X-Ray, and Ion-Beam Technology

by Douglas J. Resnick

1990 2 ed.
Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ ...

by V. K. Popov

1985 1 ed.
Emerging Lithographic Techniques VI
Emerging Lithographic Techniques VI

by Roxann L. Engelstad

2002 1 ed.
Emerging Lithographic Technologies 9
Emerging Lithographic Technologies 9

by R. Scott Mackay

2005 1 ed.
Dry processing for submicrometer lithography
Dry processing for submicrometer lithography
1990 1 ed.
Lithography Asia 2008
Lithography Asia 2008

by Alek C. Chen, Burn Lin

2008 1 ed.
Electron-beam lithography contributions from Jena
Electron-beam lithography contributions from Jena

by Peter Hahmann

2014 1 ed.
Emerging lithographic technologies V
Emerging lithographic technologies V

by Elizabeth A. Dobisz

2001 1 ed.
Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV
Electron-beam, X-ray, and ion-beam submicrometer lithographi...
1994 1 ed.
Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV
Electron-beam, X-ray, and ion-beam techniques for submicrome...
1985 1 ed.
Alternative lithographic technologies IV
Alternative lithographic technologies IV

by William Man-Wai Tong, Douglas J. Resnick

2012 1 ed.
Design technology co-optimization in the era of sub-resolution IC scaling
Design technology co-optimization in the era of sub-resoluti...

by Lars W. Liebmann

2016 1 ed.
Alternative lithographic technologies II
Alternative lithographic technologies II

by Daniel J. C. Herr

2010 1 ed.
Dian zi shu bao guang wei na jia gong ji shu
Dian zi shu bao guang wei na jia gong ji shu

by Wenqi Gu

2004 1 ed.
The physics of submicron lithography
The physics of submicron lithography

by Kamilʹ Akhmetovich Valiev

1992 1 ed.
Emerging lithographic technologies VIII
Emerging lithographic technologies VIII

by R. Scott Mackay

2004 1 ed.