Microfabrication and nanomanufacturing

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Microfabrication and nanomanufacturing

by Mark J. Jackson

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First published: 2005 1 language ISBN: 9780429246784

Subjects

Microelectromechanical systems Design and construction Nanomanufacturing Integrated circuits Microelectronics Miniaturization Microélectronique Circuits intégrés Conception et construction TECHNOLOGY

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