On-Wafer Calibration Techniques Enabling Accurate Characterization of High-Performance Silicon Devices at the Mm-Wave Range and Beyond View on Open Library

On-Wafer Calibration Techniques Enabling Accurate Characterization of High-Performance Silicon Devices at the Mm-Wave Range and Beyond

by Andrej Rumiantsev

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First published: 2019 1 language ISBN: 9781003338994
Subjects
Semiconductors Characterization Semiconductor wafers Calibration Semi-conducteurs Caractérisation Plaquettes à gravure en semi-conducteurs Étalonnage SCIENCE / Energy TECHNOLOGY / Lasers

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On-Wafer Calibration Techniques Enabling Accurate Characterization of High-Performance Silicon Devices at the Mm-Wave Range

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