Inkjetbased Micromanufacturing

by Jan G. Korvink

Implementation of the Adaptive Finite Element Method for Sem...

by Jan G. Korvink

Semiconductors for Micro- and Nanotechnology

by Jan G. Korvink, Andreas Greiner

Reliability of MEMS

by Gary K. Fedder, Jan G. Korvink

Fast simulation of electro-thermal MEMS

by Tamara Bechtold, Evgenii B. Rudnyi

This text addresses the application of a modern mathematical approach, referred to as model order reduction (MOR), for e...

Sensors, Update 12

by Henry Baltes, Gary K. Fedder

Sensors, Update 11

by Henry Baltes, Gary K. Fedder

Sensors, Update 13

by Henry Baltes, Gary K. Fedder

Sensors, Update 10

by Henry Baltes, Gary K. Fedder

Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic C...

by Tamara Bechtold, Evgenii B. Rudnyi

Enabling technology for MEMS and nanodevices

by Henry Baltes, Oliver Brand

Carbon nanotube devices

by Oliver Brand, Gary K. Fedder

Microengineering of metals and ceramics

by Henry Baltes, Oliver Brand

Microcasting is the manufacturing process of small structures in the micrometer range or of larger parts carrying micros...

CMOS-MEMS

by Henry Baltes, O. Brand

Micro Energy Harvesting

by Danick Briand, Oliver Brand

Resonant MEMS

by Oliver Brand, Fabien Josse

Thermoelectric Energy Conversion

by Diana Davila Pineda, Oliver Brand

Microengineering of Metals and Ceramics, Part I

by Henry Baltes, Oliver Brand

Micro Cyborgs

by Amit Lal, Oliver Brand

Enabling Technologies for MEMS and Nanodevices

by Henry Baltes, Oliver Brand