by Gary K. Fedder , Jan G. Korvink , Osamu Tabata
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Micro- and Nanomanipulation Tools
Micro Energy Harvesting
Micro and Nano Scale NMR
Thermoelectric Energy Conversion
Enabling technology for MEMS and nanodev...
Microengineering of metals and ceramics
Micromechatronics
Mechatronics
Numerical Simulation of Mechatronic Sens...
Micro-optomechatronics
Micro, nanosystems, and systems on chips
Nano- and microelectromechanical systems