Glow discharge processes

by Brian N. Chapman

Sputtering by Particle Bombardment I

by R. Behrisch

Sputtering by particle bombardment

by Klaus Wittmaack

Sputtered Thin Films

by Frederick Madaraka Mwema, Esther Titilayo Akinlabi

Handbook of sputter deposition technology

by Kiyotaka Wasa

Chromium Doped TiO2 Sputtered Thin Films

by Anouar Hajjaji, Mosbah Amlouk

Pulsed and pulsed bias sputtering

by Edward V. Barnat, Toh-Ming Lu

This monograph is a guide for those interested in improving sputter-based thin film technology through the use of a puls...

Reactive Sputter Deposition

by D. Depla

Sputtering by Particle Bombardment

by R. Behrisch

Physical sputtering of elemental metals and semiconductors

by Wolfgang O. Hofer

Sputtering by Particle Bombardment III

by R. Behrisch

Sputtering by Particle Bombardment II

by R. Behrisch

98/1 Reactive sputtering

by William D. Westwood

Ion surface interaction, sputtering and related phenomena

by Max-Planck-Institut

Angle of incidence dependence of light ion physical sputteri...

by A. A. Haasz

Sputtering distributions from polyerystalline copper

by R. Pettifer

Yield, energy and angular distributions of sputtered atoms

by C. H. Weijsenfeld

Sputtering Materials For Vlsi And Thin Film Devices

by Jaydeep Sarkar

Reactive Sputter Deposition

by Diederik Depla, Stijn Mahieu

Simulation calculations of physical sputtering and reflectio...

by Takaichi Kawamura, T. Ono